- Iterative imprint for multilayered nanostructures by feeding, vacuum forming, and bonding of sheets
[作者:Suzuki, H; Nagato, K; Sugimoto, S; Tsuchiya, K; Hamaguchi, T; Nakao, M,期刊:Journal Of Vacuum Science & Technology B, 页码:1753-1756 , 文章类型: Article,,卷期:2008年26-5]
- The authors proposed an iterative imprint method for multilayered nanostructures. A thermoplastic sheet is fed onto a nanostructured mold and thermally imprinted by vacuum pumping between the mold and the sheet. Next, th...
- Single-pass forming for three-dimensional microstructures by high-speed shearing of multilayer thin films
[作者:Hamaguchi, T; Yonemoto, H; Nagato, K; Tsuchiya, K; Nakao, M,期刊:Journal Of Vacuum Science & Technology B, 页码:1771-1774 , 文章类型: Article,,卷期:2008年26-5]
- The authors propose a single-pass forming technique for three-dimensional microstructures by shearing multilayer thin films. At a high strain rate, when strain is applied to a material at a speed higher than that of plas...
- Deposition of WNxCy for diffusion barrier application using the imido guanidinato complex W((NPr)-Pr-i)Cl-3[(PrNC)-Pr-i(NMe2)(NPr)-Pr-i]
[作者:Ajmera, HM; Heitsch, AT; Anderson, TJ; Wilder, CB; Reitfort, LL; McElwee-White, L; Norton, DP,期刊:Journal Of Vacuum Science & Technology B, 页码:1800-1807 , 文章类型: Article,,卷期:2008年26-5]
- A solution of the tungsten imido guanidinato complex W((NPr)-Pr-i)Cl-3[(PrNC)-Pr-i(NMe2)(NPr)-Pr-i] (1) in benzonitrile was used to deposit tungsten nitride carbide (WNxCy) thin films by chemical vapor deposition in the ...
- Study of substrate-directed ordering of long double-stranded DNA molecules on bare highly oriented pyrolytic graphite surface based on atomic force microscopy relocation imaging
[作者:Wang, HB; An, HJ; Zhang, F; Zhang, ZX; Ye, M; Xiu, P; Zhang, Y; Hu, J,期刊:Journal Of Vacuum Science & Technology B, 页码:L41-L44 , 文章类型: Article,,卷期:2008年26-5]
- Usually, long double-stranded DNA molecules exhibit an aggregated or a random spreading behavior when deposited on a highly ordered pyrolytic graphite (HOPG) substrate. In this article, the authors report a novel phenome...
- Use of ion beam assisted deposition and low temperature annealing for the fabrication of low loss, vertically stacked alumina waveguide structures
[作者:Nightingale, JR; Goswami, R; Duperre, J; Dawson, JM; Hornak, LA; Korakakis, D,期刊:Journal Of Vacuum Science & Technology B, 页码:1813-1816 , 文章类型: Article,,卷期:2008年26-5]
- Ion beam assisted deposition (IBAD) and low temperature annealing in an air atmosphere are used to significantly lower optical losses and environmentally stabilize electron beam deposited, stacked waveguide structures co...
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