| 个性化文献订阅>期刊> Journal Of Vacuum Science & Technology B |
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Electron-beam lithography of multiple-layer submicrometer periodic arrays on a barium fluoride substrate
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作者 |
Tharp, JS; Shelton, DJ; Wadsworth, SL; Boreman, GD |
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选自 |
期刊 Journal Of Vacuum Science & Technology B; 卷期 2008年26-5; 页码 1821-1823 |
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