- Periodic fuel supply to a micro-DMFC using a piezoelectric linear actuator
[作者:Hwang, JY; Shin, KY; Lee, SH; Kang, K; Kang, H; Lee, JH; Peck, DH; Jung, DH; Jang, JH,期刊:Journal of Micromechanics and Microengineering, 页码:85023-85023 , 文章类型: Article,,卷期:2010年20-8]
- A reciprocating pump using a piezoelectric linear actuator is introduced as a fuel supply module for a direct methanol fuel cell (DMFC) stack. The results show that the key advantage of the pump with the linear actuator ...
- Characterization of epitaxial Pb(Zr, Ti)O-3 thin films deposited by pulsed laser deposition on silicon cantilevers
[作者:Nguyen, MD; Nazeer, H; Karakaya, K; Pham, SV; Steenwelle, R; Dekkers, M; Abelmann, L; Blank, DHA; Rijnders, G,期刊:Journal of Micromechanics and Microengineering, 页码:85022-85022 , 文章类型: Article,,卷期:2010年20-8]
- This paper reports on the piezoelectric-microelectromechanical system micro-fabrication process and the behavior of piezoelectric stacks actuated silicon cantilevers. All oxide layers in the piezoelectric stacks, such as...
- MEMS climate sensor for crops in greenhouses
[作者:Birkelund, K; Jensen, KD; Hojlund-Nielsen, E; Nagstrup, J; Lei, A; Petersen, SD; Andreassen, AU; Thomsen, EV,期刊:Journal of Micromechanics and Microengineering, 页码:85021-85021 , 文章类型: Article,,卷期:2010年20-8]
- We have developed and fabricated a multi-sensor chip for greenhouse applications and demonstrated the functionality under controlled conditions. The sensor consists of a humidity sensor, temperature sensor and three phot...
- Fabrication of robust tooling for mass production of polymeric microfluidic devices
[作者:Fu, G; Tor, SB; Loh, NH; Hardt, DE,期刊:Journal of Micromechanics and Microengineering, 页码:85019-85019 , 文章类型: Article,,卷期:2010年20-8]
- Polymer microfluidic devices are gaining popularity for bio-applications. In both commonly used methods for the fabrication of polymer microfluidic devices, i.e. injection molding and hot-embossing, the quality of a mold...
- Discretely tunable micromachined injection-locked lasers
[作者:Cai, H; Zhang, XM; Liu, AQ; Liu, B; Yu, MB; Lo, GQ; Kwong, DL,期刊:Journal of Micromechanics and Microengineering, 页码:85018-85018 , 文章类型: Article,,卷期:2010年20-8]
- This paper reports a micromachined injection-locked laser (ILL) to provide tunable discrete wavelengths. It utilizes a non-continuously tunable laser as the master to lock a Fabry-Perot semiconductor laser chip. Both las...
- Finite element analysis of the penetration depth/tip radius ratio dependence on the correction factor beta in instrumented indentation of elastic-plastic materials (vol 20, 065003, 2010)
[作者:Abbes, F; Troyon, M; Meza, JM; Potiron, S,期刊:Journal of Micromechanics and Microengineering, 页码:89802-89802 , 文章类型: Correction,,卷期:2010年20-8]
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- Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching
[作者:Chekurov, N; Grigoras, K; Sainiemi, L; Peltonen, A; Tittonen, I; Franssila, S,期刊:Journal of Micromechanics and Microengineering, 页码:85009-85009 , 文章类型: Article,,卷期:2010年20-8]
- In this paper, we demonstrate silicon microdevice fabrication by a combination of focused ion beam (FIB) and cryogenic deep reactive ion etching (DRIE). Applying FIB treatment only to a thin surface layer enables very hi...
- A microfluidic platform with a free-standing perforated polymer membrane
[作者:Choi, J; Roychowdhury, A; Kim, N; Nikitopoulos, DE; Lee, W; Han, H; Park, S,期刊:Journal of Micromechanics and Microengineering, 页码:85011-85011 , 文章类型: Article,,卷期:2010年20-8]
- A membrane architecture that facilitates access from both sides in microfluidic environments provides a flexible platform for the study of biosystems. Here, we report for the first time on a simple and low cost fabricati...
- Development of a new generation of active AFM tools for applications in liquids
[作者:Rollier, AS; Jenkins, D; Dogheche, E; Legrand, B; Faucher, M; Buchaillot, L,期刊:Journal of Micromechanics and Microengineering, 页码:85010-85010 , 文章类型: Article,,卷期:2010年20-8]
- Atomic force microscopy (AFM) is a powerful imaging tool with high-resolution imaging capability. AFM probes consist of a very sharp tip at the end of a silicon cantilever that can respond to surface artefacts to produce...
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