Analysis of the vibration modes of piezoelectric circular microdiaphragms

[摘要]：The vibration modes of a piezoelectric circular microdiaphragm (PCM) are visualized and investigated in this paper. The PCM was previously fabricated by combining sol-gel PZT thin film and MEMS technology (Olfatnia et al 2010 J. Micromech. Microeng. 20 01

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