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文章名     作者     期刊名     摘要     卷     期         如果没有找到您所需要的文献，请点击 ——此处申请     共48条记录   Scanning grating based in-plane movement sensing [作者：Yu, HB; Zhou, GY; Sinha, SK; Chau, FS,期刊：Journal of Micromechanics and Microengineering, 页码：85007-85007 , 文章类型： Article，,卷期：2010年20-8] A novel method for detecting the in-plane movement of MEMS devices has been presented, in which a scanning grating structure has been adopted. One end of the grating is directly connected to the movable platform under te... Sensitivity enhancement of a micro-scale biomimetic tactile sensor with epidermal ridges [作者：Zhang, YH,期刊：Journal of Micromechanics and Microengineering, 页码：85012-85012 , 文章类型： Article，,卷期：2010年20-8] A microscale biomimetic tactile sensor with epidermal ridges is proposed to enhance the sensitivity of force detection. Guided by the principles of the human tactile perception mechanism, specifically the epidermal ridge... Periodic fuel supply to a micro-DMFC using a piezoelectric linear actuator [作者：Hwang, JY; Shin, KY; Lee, SH; Kang, K; Kang, H; Lee, JH; Peck, DH; Jung, DH; Jang, JH,期刊：Journal of Micromechanics and Microengineering, 页码：85023-85023 , 文章类型： Article，,卷期：2010年20-8] A reciprocating pump using a piezoelectric linear actuator is introduced as a fuel supply module for a direct methanol fuel cell (DMFC) stack. The results show that the key advantage of the pump with the linear actuator ... Characterization of epitaxial Pb(Zr, Ti)O-3 thin films deposited by pulsed laser deposition on silicon cantilevers [作者：Nguyen, MD; Nazeer, H; Karakaya, K; Pham, SV; Steenwelle, R; Dekkers, M; Abelmann, L; Blank, DHA; Rijnders, G,期刊：Journal of Micromechanics and Microengineering, 页码：85022-85022 , 文章类型： Article，,卷期：2010年20-8] This paper reports on the piezoelectric-microelectromechanical system micro-fabrication process and the behavior of piezoelectric stacks actuated silicon cantilevers. All oxide layers in the piezoelectric stacks, such as... MEMS climate sensor for crops in greenhouses [作者：Birkelund, K; Jensen, KD; Hojlund-Nielsen, E; Nagstrup, J; Lei, A; Petersen, SD; Andreassen, AU; Thomsen, EV,期刊：Journal of Micromechanics and Microengineering, 页码：85021-85021 , 文章类型： Article，,卷期：2010年20-8] We have developed and fabricated a multi-sensor chip for greenhouse applications and demonstrated the functionality under controlled conditions. The sensor consists of a humidity sensor, temperature sensor and three phot... Experimental investigation of a display chip incorporating an electrostatic actuating polymer membrane [作者：Chuang, YJ; Liao, TH; Chen, PR; Hung, KY,期刊：Journal of Micromechanics and Microengineering, 页码：85020-85020 , 文章类型： Article，,卷期：2010年20-8] By integrating a planar waveguide and scattering phenomenon generated by electrostatically actuating a transparent polymer thin film, a display chip capable of being cleared and re-displayed was developed using micro fab... Fabrication of robust tooling for mass production of polymeric microfluidic devices [作者：Fu, G; Tor, SB; Loh, NH; Hardt, DE,期刊：Journal of Micromechanics and Microengineering, 页码：85019-85019 , 文章类型： Article，,卷期：2010年20-8] Polymer microfluidic devices are gaining popularity for bio-applications. In both commonly used methods for the fabrication of polymer microfluidic devices, i.e. injection molding and hot-embossing, the quality of a mold... Discretely tunable micromachined injection-locked lasers [作者：Cai, H; Zhang, XM; Liu, AQ; Liu, B; Yu, MB; Lo, GQ; Kwong, DL,期刊：Journal of Micromechanics and Microengineering, 页码：85018-85018 , 文章类型： Article，,卷期：2010年20-8] This paper reports a micromachined injection-locked laser (ILL) to provide tunable discrete wavelengths. It utilizes a non-continuously tunable laser as the master to lock a Fabry-Perot semiconductor laser chip. Both las... Finite element analysis of the penetration depth/tip radius ratio dependence on the correction factor beta in instrumented indentation of elastic-plastic materials (vol 20, 065003, 2010) [作者：Abbes, F; Troyon, M; Meza, JM; Potiron, S,期刊：Journal of Micromechanics and Microengineering, 页码：89802-89802 , 文章类型： Correction，,卷期：2010年20-8] Single-step fabrication of microfluidic channels filled with nanofibrous membrane using femtosecond laser irradiation [作者：Tavangar, A; Tan, B; Venkatakrishnan, K,期刊：Journal of Micromechanics and Microengineering, 页码：85016-85016 , 文章类型： Article，,卷期：2010年20-8] In this paper, we demonstrate a new method of fabricating silicon microfluidic channels filled with a porous nanofibrous structure utilizing a femtosecond laser. The nanofibrous structure can act as a membrane used for m... Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching [作者：Chekurov, N; Grigoras, K; Sainiemi, L; Peltonen, A; Tittonen, I; Franssila, S,期刊：Journal of Micromechanics and Microengineering, 页码：85009-85009 , 文章类型： Article，,卷期：2010年20-8] In this paper, we demonstrate silicon microdevice fabrication by a combination of focused ion beam (FIB) and cryogenic deep reactive ion etching (DRIE). Applying FIB treatment only to a thin surface layer enables very hi... Spatio-temporal dynamics of microcantilevers tapping on samples observed under an atomic force microscope integrated with a scanning laser Doppler vibrometer: applications to proper orthogonal decomposition and model reduction [作者：Spletzer, M; Raman, A; Reifenberger, R,期刊：Journal of Micromechanics and Microengineering, 页码：85024-85024 , 文章类型： Article，,卷期：2010年20-8] As the use of microsystems has become more widespread, the need for reduced order models that accurately and efficiently predict their dynamic behavior has also grown. Proper orthogonal decomposition (POD) has proven to ... Analysis of the vibration modes of piezoelectric circular microdiaphragms [作者：Olfatnia, M; Singh, VR; Xu, T; Miao, JM; Ong, LS,期刊：Journal of Micromechanics and Microengineering, 页码：85013-85013 , 文章类型： Article，,卷期：2010年20-8] The vibration modes of a piezoelectric circular microdiaphragm (PCM) are visualized and investigated in this paper. The PCM was previously fabricated by combining sol-gel PZT thin film and MEMS technology (Olfatnia et al... Galvanically coupled gold/silicon-on-insulator microstructures in hydrofluoric acid electrolytes: finite element simulation and morphological analysis of electrochemical corrosion [作者：Becker, CR; Miller, DC; Stoldt, CR,期刊：Journal of Micromechanics and Microengineering, 页码：85017-85017 , 文章类型： Article，,卷期：2010年20-8] During the post-processing of silicon (Si) microsystems in hydrofluoric acid (HF)-based solutions, a galvanic couple is formed between the Si (anode) and metallic overlayers (cathode), such as gold (Au). Electrochemical ... A microfluidic platform with a free-standing perforated polymer membrane [作者：Choi, J; Roychowdhury, A; Kim, N; Nikitopoulos, DE; Lee, W; Han, H; Park, S,期刊：Journal of Micromechanics and Microengineering, 页码：85011-85011 , 文章类型： Article，,卷期：2010年20-8] A membrane architecture that facilitates access from both sides in microfluidic environments provides a flexible platform for the study of biosystems. Here, we report for the first time on a simple and low cost fabricati... Development of a new generation of active AFM tools for applications in liquids [作者：Rollier, AS; Jenkins, D; Dogheche, E; Legrand, B; Faucher, M; Buchaillot, L,期刊：Journal of Micromechanics and Microengineering, 页码：85010-85010 , 文章类型： Article，,卷期：2010年20-8] Atomic force microscopy (AFM) is a powerful imaging tool with high-resolution imaging capability. AFM probes consist of a very sharp tip at the end of a silicon cantilever that can respond to surface artefacts to produce...