- The design, fabrication and characterization of a silicon microheater for an integrated MEMS gas preconcentrator - art. no. 125001
[作者:Yeom, J; Field, CR; Bae, B; Masel, RI; Shannon, MA,期刊:Journal of Micromechanics and Microengineering, 页码:25001-25001 , 文章类型: Article,,卷期:2008年18-12]
- We report the design and fabrication of a microheater unit as a key component of an integrated micro gas preconcentrator that has an ultra-small preconcentrator volume (< 0.25 mu L) and microvalves for fast injection spe...
- Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits - art. no. 125003
[作者:Prest, MJ; Wang, Y; Huang, F; Lancaster, MJ,期刊:Journal of Micromechanics and Microengineering, 页码:25003-25003 , 文章类型: Article,,卷期:2008年18-12]
- Tuning of a superconducting microwave resonator, operating at 77 K, is demonstrated using a silicon micro-machined comb-drive actuator. Thermal expansion coefficient differences between the silicon actuator and the MgO s...
- Processing of thin SU-8 films - art. no. 125020
[作者:Keller, S; Blagoi, G; Lillemose, M; Haefliger, D; Boisen, A,期刊:Journal of Micromechanics and Microengineering, 页码:25020-25020 , 文章类型: Article,,卷期:2008年18-12]
- This paper summarizes the results of the process optimization for SU-8 films with thicknesses <= 5 mu m. The influence of soft-bake conditions, exposure dose and post-exposure-bake parameters on residual film stress, str...
- A self-priming, high performance, check valve diaphragm micropump made from SOI wafers - art. no. 125021
[作者:Kang, J; Mantese, JV; Auner, GW,期刊:Journal of Micromechanics and Microengineering, 页码:25021-25021 , 文章类型: Article,,卷期:2008年18-12]
- In this paper, we describe a self-priming high performance piezoelectrically actuated check valve diaphragm micropump. The micropump was fabricated from three wafers: two silicon-on-insulator (SOI) wafers and one silicon...
- Piezoelectrically pushed rotational micromirrors using detached PZT actuators for wide-angle optical switch applications - art. no. 125022
[作者:Kim, SJ; Cho, YH; Nam, HJ; Bu, JU,期刊:Journal of Micromechanics and Microengineering, 页码:25022-25022 , 文章类型: Article,,卷期:2008年18-12]
- This paper presents a torsional micromirror detached from PZT actuators (TMD), whose rotational motion is achieved by push bars in the PZT actuators, detached from the micromirror. The push bar mechanism is intended to r...
- Design and development of a 3D scanning MEMS OCT probe using a novel SiOB package assembly - art. no. 125005
[作者:Xu, Y; Singh, J; Premachandran, CS; Khairyanto, A; Chen, KWS; Chen, N; Sheppard, CJR; Olivo, M,期刊:Journal of Micromechanics and Microengineering, 页码:25005-25005 , 文章类型: Article,,卷期:2008年18-12]
- A MEMS optical coherence tomography (OCT) probe prototype was developed using a unique assembly based on silicon optical bench (SiOB) methodology. The probe is formed by integrating a three-dimensional (3D) scanning micr...
- Photoresist coating and patterning for through-silicon via technology - art. no. 125008
[作者:Pham, NP; Tezcan, DS; Ruythooren, W; De Moor, P; Majeed, B; Baert, K; Swinnen, B,期刊:Journal of Micromechanics and Microengineering, 页码:25008-25008 , 文章类型: Article,,卷期:2008年18-12]
- Three-dimensional (3D) integration requires through-wafer interconnects, i.e. an integration of electrical connections from one side of the wafer to the other side. In some cases, it involves the lithographic patterning ...
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