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文章名     作者     期刊名     摘要     卷     期         如果没有找到您所需要的文献，请点击 ——此处申请     共17条记录   Nanoscale displacement measurement of electrostatically actuated micro-devices using optical microscopy and digital image correlation [作者：Ya'akobovitz, A; Krylov, S; Hanein, Y,期刊：Sensors And Actuators A-Physical, 页码：1-7 , 文章类型： Article，,卷期：2010年162-1] Recent progress achieved in the fields of micro and nanoelectromechanical systems demands a reliable method for high resolution characterization of electrostatically actuated devices. This paper presents a study on optic... Enhanced bundle fiber displacement sensor based on concave mirror [作者：Yang, HZ; Lim, KS; Harun, SW; Dimyati, K; Ahmad, H,期刊：Sensors And Actuators A-Physical, 页码：8-12 , 文章类型： Article，,卷期：2010年162-1] Fiber optic displacement sensor (FODS) is proposed using a concave mirror for enhanced flexibility in sensitivity selection and linear range. The effect of focal length and diameter of the concave mirror on the displacem... Evaluation of the planar inductive magnetic field sensors for metallic crack detections [作者：Cha, YJ; Nam, B; Kim, J; Kim, KH,期刊：Sensors And Actuators A-Physical, 页码：13-19 , 文章类型： Article，,卷期：2010年162-1] The planar inductive magnetic field sensors were fabricated by photolithography process. The sensor was composed of the planar coils (42 turns and 120 turns) with magnetic thin film as a core. To evaluate the sensor for ... Analysis of the optical power loss arising from a fibre coupled integrating sphere used as a compact gas sensor [作者：Chambers, P; Lyons, WB; Sun, T; Grattan, KTV,期刊：Sensors And Actuators A-Physical, 页码：20-23 , 文章类型： Article，,卷期：2010年162-1] An analysis describing the path-length enhancement and the power loss that is encountered by a light beam traversing a fibre optic coupled integrating sphere used as a gas sensor cell is reported. The results presented h... Fabrication of gas ionization sensor using carbon nanotube arrays grown on porous silicon substrate [作者：Nikfarjam, A; Zad, AI; Razi, F; Mortazavi, SZ,期刊：Sensors And Actuators A-Physical, 页码：24-28 , 文章类型： Article，,卷期：2010年162-1] We fabricated gas sensors based on field ionization from multiwalled carbon nanotube (MWCNT) arrays grown on porous silicon templates. MWCNTs were grown through thermal chemical vapor deposition. We measured breakdown vo... High-pressure deflection behavior of laser micromachined bulk 6H-SiC MEMS sensor diaphragms [作者：Simsek, E; Pecholt, B; Everson, C; Molian, P,期刊：Sensors And Actuators A-Physical, 页码：29-35 , 文章类型： Article，,卷期：2010年162-1] Single crystalline silicon carbide (SiC) in bulk or thin film form has the potential to be a durable and reliable M EMS pressure sensor in high-temperature and harsh chemical environments. Laser micromachining can fabric... Influence of amplitude and frequency modulation on flow created by a synthetic jet actuator [作者：Qayoum, A; Gupta, V; Panigrahi, PK; Muralidhar, K,期刊：Sensors And Actuators A-Physical, 页码：36-50 , 文章类型： Article，,卷期：2010年162-1] Synthetic jet actuator is a compact device that has applications in drag reduction, heat transfer enhancement and controlled mixing. An isolated synthetic jet is produced by the interaction of a train of vortices that ar... Modeling of a walking piezo actuator [作者：Merry, R; van de Molengraft, R; Steinbuch, M,期刊：Sensors And Actuators A-Physical, 页码：51-60 , 文章类型： Article，,卷期：2010年162-1] Piezoelectric actuators are often used in positioning devices that require (sub)nanometer resolution. In this paper, we develop an electro-mechanical dynamic model of a walking piezo actuator. The derived model structure... Solid-gas surface effect on the performance of a MEMS-class nozzle for micropropulsion [作者：Morinigo, JA; Hermida-Quesada, J,期刊：Sensors And Actuators A-Physical, 页码：61-71 , 文章类型： Article，,卷期：2010年162-1] Steady-state performance of a three-dimensional flat-shaped micronozzle in underexpanded cold- and hot-gas operation has been analysed with numerical simulation. The flow regime is supersonic and characterized by a Knuds... Developing a novel SMA-actuated robotic module [作者：Hadi, A; Yousefi-Koma, A; Moghaddam, MM; Elahinia, M; Ghazavi, A,期刊：Sensors And Actuators A-Physical, 页码：72-81 , 文章类型： Article，,卷期：2010年162-1] Unstructured environments and task based goals require varying robot configurations to fulfill the missions. Modular robotic systems are fast growing solutions for this purpose, where the robot configuration may quickly ... Design and characterisation of a piezoelectric scavenging device with multiple resonant frequencies [作者：Chew, ZJ; Li, LJ,期刊：Sensors And Actuators A-Physical, 页码：82-92 , 文章类型： Article，,卷期：2010年162-1] This paper reports design and characterisation of a new piezoelectric scavenging device that has multiple resonant frequencies in the low frequency range. The structure is constructed with the most accessible off-the-she... Controlling stress and stress gradient during the release process in gold suspended micro-structures [作者：Mulloni, V; Giacomozzi, F; Margesin, B,期刊：Sensors And Actuators A-Physical, 页码：93-99 , 文章类型： Article，,卷期：2010年162-1] In this paper it will be demonstrated that the conditions of the final release process in oxygen plasma strongly influence the shape of suspended gold micro-structures. Both single-clamped and double-clamped cantilever t... Acoustic emission sensor with structure-enhanced sensing mechanism based on micro-embossed piezoelectric polymer [作者：Feng, GH; Tsai, MY,期刊：Sensors And Actuators A-Physical, 页码：100-106 , 文章类型： Article，,卷期：2010年162-1] This paper presents art innovative polymer-based micromachined acoustic emission (AE) sensor. Using a novel micro-embossing fabrication method, a piezoelectric sensing core element is constructed with multi-layer polyvin... Design and characterization of a magnetic digital flow regulator [作者：Casals-Terre, J; Duch, M; Plaza, JA; Esteve, J; Perez-Castillejos, R; Valles, E; Gomez, E,期刊：Sensors And Actuators A-Physical, 页码：107-115 , 文章类型： Article，,卷期：2010年162-1] Design, fabrication and testing of a novel micromachined "quasi-digital" microflow regulator for integrated microfluidic systems. Operation relies on the use of a permanent magnet which interacts with an electrodeposited... Implementation of wireless body area networks for healthcare systems [作者：Yuce, MR,期刊：Sensors And Actuators A-Physical, 页码：116-129 , 文章类型： Article，,卷期：2010年162-1] This work describes the implementation of a complete wireless body-area network (WBAN) system to deploy in medical environments. Issues related to hardware implementations, software and wireless protocol designs are addr... A wafer-scale etching technique for high aspect ratio implantable MEMS structures [作者：Bhandari, R; Negi, S; Rieth, L; Solzbacher, F,期刊：Sensors And Actuators A-Physical, 页码：130-136 , 文章类型： Article，,卷期：2010年162-1] Microsystem technology is well suited to batch fabricate microelectrode arrays, such as the Utah electrode array (UEA), intended for recording and stimulating neural tissue. Fabrication of the UEA is primarily based on t...