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  • Design of a Time-Based Micro-g Accelerometer
    [作者:Dias, RA; Mol, L; Wolffenbuttel, RF; Cretu, E; Rocha, LA,期刊:IEEE Sensors Journal, 页码:1677-1683 , 文章类型: Article,,卷期:2011年11-8]
  • Closed-loop pull-in time operated devices are a good alternative for high sensitivity accelerometers. This paper proposes the use of time measurement as the transduction mechanism for the realization of a high-precision ...