Improved Sensitivity of AlGaN/GaN Field Effect Transistor Biosensors by Optimized Surface Functionalization

[摘要]：In this paper, we optimize the AlGaN surface oxidation methods for AlGaN/GaN heterostructure field effect transistor (HFET) biological sensors. Reactive ion etching oxygen plasma, inductively coupled oxygen plasma, and piranha solution are used to oxidize

[全文传递流程]：

一般上传文献全文的时限在1个工作日内