- Voxels: volume-enclosing microstructures - art. no. 055025
[作者:Gagler, R; Bugacov, A; Koel, BE; Will, PM,期刊:Journal of Micromechanics and Microengineering, 页码:55025-55025 , 文章类型: Article,,卷期:2008年18-5]
- This paper presents results on the development and fabrication of hollow 3D, programmable-volume, micro-scale, artificial, non-biological volume cells or voxels. The standardized silicon wafer processing method PolyMUMPs...
- Fabrication of a SFF-based three-dimensional scaffold using a precision deposition system in tissue engineering - art. no. 055027
[作者:Kim, JY; Park, EK; Kim, SY; Shin, JW; Cho, DW,期刊:Journal of Micromechanics and Microengineering, 页码:55027-55027 , 文章类型: Article,,卷期:2008年18-5]
- Recent developments in tissue-engineering techniques allow physicians to treat a range of previously untreatable conditions. In the development of such techniques, scaffolds with a controllable pore size and porosity hav...
- Development of a lateral velocity-controlled MEMS vibratory gyroscope and its performance test - art. no. 055028
[作者:Sung, WT; Sung, SK; Lee, JY; Kang, TS; Lee, YJ; Lee, JG,期刊:Journal of Micromechanics and Microengineering, 页码:55028-55028 , 文章类型: Article,,卷期:2008年18-5]
- The objective of this paper is to present a velocity-controlled vibratory MEMS gyroscope that achieves consistent output characteristics in the lateral driving dynamics of the system. Through a systematic automatic gain ...
- Hydrophobic coatings for MEMS applications - art. no. 055030
[作者:Doms, M; Feindt, H; Kuipers, WJ; Shewtanasoontorn, D; Matar, AS; Brinkhues, S; Welton, RH; Mueller, J,期刊:Journal of Micromechanics and Microengineering, 页码:55030-55030 , 文章类型: Article,,卷期:2008年18-5]
- Different kinds of thin-film coatings were investigated with regard to their applicability as hydrophobic coatings for MEMS. The films were deposited onto silicon and borosilicate glass substrates by spincoating of Dyneo...
- The fabrication of silicon-based PZT microstructures using an aerosol deposition method - art. no. 055034
[作者:Wang, XY; Lee, CY; Hu, YC; Shih, WP; Lee, CC; Huang, JT; Chang, PZ,期刊:Journal of Micromechanics and Microengineering, 页码:55034-55034 , 文章类型: Article,,卷期:2008年18-5]
- This paper presents a series of processes for fabricating lead-zirconate-titanate (PZT) microstructures on a silicon substrate. An aerosol deposition method was used to deposit PZT thick film at room temperature. The low...
- Design and fabrication of a high sensitivity focal plane array for uncooled IR imaging - art. no. 057001
[作者:Yu, XM; Yi, YL; Ma, SL; Liu, M; Liu, XH; Dong, LQ; Zhao, YJ,期刊:Journal of Micromechanics and Microengineering, 页码:57001-57001 , 文章类型: Article,,卷期:2008年18-5]
- This note reports on the development of a novel cantilever-based focal plane array (FPA) for uncooled infrared (IR) imaging. The FPA of 160 x 120 pixels consisted of a 1 mu m thick low stress SiNx structure layer, a thin...
- A new scheme of fiber end-face fabrication employing a variable torque technique - art. no. 055003
[作者:Tsai, YC; Liu, YD; Cao, CL; Lu, YK; Cheng, WH,期刊:Journal of Micromechanics and Microengineering, 页码:55003-55003 , 文章类型: Article,,卷期:2008年18-5]
- A new scheme of optical fibers with different types of end-faces by applying different types of periodical variable torques to control the polishing pressure is proposed and fabricated. Two types of mechanisms, mechanica...
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