[摘要]：Different kinds of thin-film coatings were investigated with regard to their applicability as hydrophobic coatings for MEMS. The films were deposited onto silicon and borosilicate glass substrates by spincoating of Dyneon (TM) PTFE and PFA, plasmapolymerization of HMDS-N and C4F8 as well as liquid-phase and vapor-phase coating of SAMs from DDMS, FDTS, FOTS and Geleste Aquaphobe (TM) CM. The layer properties were analyzed using profilometry, FTIR, SEM and contact angle measurements. Furthermore, the adhesion of the layers to the substrates was determined in an acetone ultrasonic bath. The influence of various deposition process parameters on the properties of the films was investigated. As these layers can be used in microfluidic systems, as water-repellent layers and as anti-stiction coatings, they are suited for versatile fields of application.
