- Particle manipulation using 3D ac electro-osmotic micropumps - art. no. 064016
[作者:Hilber, W; Weiss, B; Mikolasek, M; Holly, R; Hingerl, K; Jakoby, B,期刊:Journal of Micromechanics and Microengineering, 页码:64016-64016 , 文章类型: Article,,卷期:2008年18-6]
- We present a novel mechanism of particle manipulation in alternating-current (ac)-driven electro-osmotic micropumps, utilizing the tunable ratio of viscous drag, inertial and dielectrophoretic forces. The latter are indu...
- Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph - art. no. 064006
[作者:Grabarnik, S; Emadi, A; Wu, H; de Graaf, G; Vdovin, G; Wolffenbuttel, RF,期刊:Journal of Micromechanics and Microengineering, 页码:64006-64006 , 文章类型: Article,,卷期:2008年18-6]
- The design, fabrication and performance of a highly miniaturized optical spectrometer are described. The volume of the opto-electronic system is only 50 mm(3). The main components are a planar imaging diffraction grating...
- Micro/nanoimprinting of glass under high temperature using a CVD diamond mold - art. no. 065013
[作者:Komori, M; Uchiyama, H; Takebe, H; Kusuura, T; Kobayashi, K; Kuwahara, H; Tsuchiya, T,期刊:Journal of Micromechanics and Microengineering, 页码:65013-65013 , 文章类型: Article,,卷期:2008年18-6]
- For micro/nanoimprinting of glass, the appropriate combination of glass and mold material was clarified by an adhesion test using chemical vapor deposition (CVD) diamond, silicon, glassy carbon and sintered nitride ceram...
- A PCB-like process for vertically configured thermopiles - art. no. 065021
[作者:Lindeberg, M; Yousef, H; Rodjegard, H; Martin, H; Hjort, K,期刊:Journal of Micromechanics and Microengineering, 页码:65021-65021 , 文章类型: Article,,卷期:2008年18-6]
- Thermopiles are important components in infrared thermal detectors, thermoelectric generators and thermoelectric coolers. We present a thermopile structure with up to 224 vertically arranged thermocouple legs in a polyim...
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