- Varifocal liquid lenses with integrated actuator, high focusing power and low operating voltage fabricated on 200 mm wafers
[作者:Pouydebasque, A; Bridoux, C; Jacquet, F; Moreau, S; Sage, E; Saint-Patrice, D; Bouvier, C; Kopp, C; Marchand, G; Bolis, S; Sillon, N; Vigier-Blanc, E,期刊:Sensors And Actuators A-Physical, 页码:280-286 , 文章类型: Article,,卷期:2011年172-1]
- We developed an innovative type of varifocal liquid lens actuated by electrostatic parallel plates. The 3 mm diameter lens is made of a polymer membrane that encapsulates a high permittivity liquid in a cavity on top of ...
- Precision friction measurement between ultrathin wire and microprobe
[作者:Akanda, MAS; Tohmyoh, H; Saka, M,期刊:Sensors And Actuators A-Physical, 页码:189-194 , 文章类型: Article,,卷期:2011年172-1]
- In this study, using an experimental technique based on small-span bending, the friction behaviors of ultrathin Pt wires with the tungsten microprobes have been reported. In the technique, friction force for sliding of a...
- Surface patterned polymer micro-cantilever arrays for sensing
[作者:Urwyler, P; Schift, H; Gobrecht, J; Hafeli, O; Altana, M; Battiston, F; Muller, B,期刊:Sensors And Actuators A-Physical, 页码:2-8 , 文章类型: Article,,卷期:2011年172-1]
- Microinjection molding was employed to fabricate low-cost polymer cantilever arrays for sensor applications. Cantilevers with micrometer dimensions and aspect ratios as large as 10 were successfully manufactured from pol...
- NEG thin films for under controlled atmosphere MEMS packaging
[作者:Tenchine, L; Baillin, X; Faure, C; Nicolas, P; Martinez, E; Papon, AM,期刊:Sensors And Actuators A-Physical, 页码:233-239 , 文章类型: Article,,卷期:2011年172-1]
- Non-evaporable getter (NEC) thin films for residual gases control in micro-electro-mechanical systems (MEMS) cavities after sealing are considered. For this study, several getters are deposited and analyzed in terms of s...
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