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[摘要]：A Venturi-type flow sensor has been designed and fabricated for neonatal respiratory assistance to control airway pressure and tidal volume. As the low flow range and sensing principle require the measurement of correspondingly very low pressures, a very responsive sensor, based on a polymer membrane acting onto a piezoresistive cantilever force sensor based on low-temperature co-fired ceramic (LTCC), was developed. This paper details the 3D modelling, manufacture, assembly and characterisation of the sensor. Compared to expensive and fragile MEMS-based devices, this sensor, based on LTCC, thick-film technology and polymer parts, provides an accurate and robust, yet low-cost alternative. (C) 2011 Elsevier B.V. All rights reserved. |
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