- Modeling, design, fabrication and characterization of a micro Coriolis mass flow sensor
[作者:Haneveld, J; Lammerink, TSJ; de Boer, MJ; Sanders, RGP; Mehendale, A; Lotters, JC; Dijkstra, M; Wiegerink, RJ,期刊:Journal of Micromechanics and Microengineering, 页码:125001-125001 , 文章类型: Article,,卷期:2010年20-12]
- This paper discusses the modeling, design and realization of micromachined Coriolis mass flow sensors. A lumped element model is used to analyze and predict the sensor performance. The model is used to design a sensor fo...
- MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal design
[作者:Torrents, A; Azgin, K; Godfrey, SW; Topalli, ES; Akin, T; Valdevit, L,期刊:Journal of Micromechanics and Microengineering, 页码:125004-125004 , 文章类型: Article,,卷期:2010年20-12]
- This paper presents the design, optimization and manufacturing of a novel micro-fabricated load cell based on a double-ended tuning fork. The device geometry and operating voltages are optimized for maximum force resolut...
- Long-range surface plasmon resonance sensor with liquid micro-channels to maintain the symmetry condition of the refractive index
[作者:Kan, T; Kojo, H; Iwase, E; Matsumoto, K; Shimoyama, I,期刊:Journal of Micromechanics and Microengineering, 页码:125005-125005 , 文章类型: Article,,卷期:2010年20-12]
- We propose a method to maintain the symmetry of the refractive index with respect to an Au film, in which the refractive indices are the same near both surfaces of the Au film, for LRSPR (long-range surface plasmon reson...
- Copper foil-type vibration-based electromagnetic energy harvester
[作者:Khan, F; Sassani, F; Stoeber, B,期刊:Journal of Micromechanics and Microengineering, 页码:125006-125006 , 文章类型: Article,,卷期:2010年20-12]
- This paper presents the modeling, simulation, fabrication and experimental results of a vibration-based electromagnetic power generator (EMPG). A novel, low-cost, one-mask technique is used to fabricate the planar coils ...
- Metal nanoparticle direct inkjet printing for low-temperature 3D micro metal structure fabrication
[作者:Ko, SH; Chung, J; Hotz, N; Nam, KH; Grigoropoulos, CP,期刊:Journal of Micromechanics and Microengineering, 页码:125010-125010 , 文章类型: Article,,卷期:2010年20-12]
- Inkjet printing of functional materials is a key technology toward ultra-low-cost, large-area electronics. We demonstrate low-temperature 3D micro metal structure fabrication by direct inkjet printing of metal nanopartic...
- The MEMSamp: using (RF-)MEMS switches for the micromechanical amplification of electronic signals
[作者:van Spengen, WM; Roobol, SB; Klaassen, WP; Oosterkamp, TH,期刊:Journal of Micromechanics and Microengineering, 页码:125011-125011 , 文章类型: Article,,卷期:2010年20-12]
- Semiconductor-based electronic amplifiers are ubiquitous in the modern world, but have fundamental limitations, such as the impossibility of using them at extreme temperatures and their sensitivity to ionizing radiation....
- Three-dimensional photolithography technology for a fiber substrate using a microfabricated exposure module
[作者:Lu, Y; Zhang, Y; Lu, JA; Mimura, A; Matsumoto, S; Itoh, T,期刊:Journal of Micromechanics and Microengineering, 页码:125013-125013 , 文章类型: Article,,卷期:2010年20-12]
- This paper proposes a new three-dimensional (3D) photolithography technology for a high-resolution micropatterning process on a fiber substrate. A brief review on the lithography technology of the non-planar surface is a...
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