Observing the Nucleation Phase of Atomic Layer Deposition In Situ

[摘要]：We present in situ topographical observations of film growth during the initial cycles of atomic layer deposition (ALD) using scanning tunneling microscopy (STM). We present cycle-by-cycle STM topographs of zinc sulfide films during ALD on Au(111) surfaces, tracking individual grains, 5 rim in diameter, as they grow over tens of cycles. We find that grain morphology is temperature-dependent and grain size increases with deposition temperature from 100 to 160 degrees C.

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