[摘要]：In this article we present a fabrication method for producing 15 nm wide 45 nm deep nanogrooves on the metal surface that provide for efficient light trapping. These grooves form a subwavelength grating that allows p-polarized light to efficiently cople to the surface plasmon polaritons modes inside the grooves producing complete absorption. A test-of-concept device showing 16 times increase in absorption compared to the plain metal is presented. The authors also present an alternative fabrication method for producing higher quality devices with sub-10 nm wide grooves. (C) 2011 American Vacuum Society. [DOI: 10.1116/1.3634021]
