[摘要]：For enhancing the micromirror properties like tilting angle and stability during actuation, Fe-based metallic glass (MG) was applied for torsion bar material. A micromirror with mirror-plate diameter of 900 mu m and torsion bar dimensions length 250 mu m, width 30 mu m and thickness 2.5 mu m was chosen for the tilting angle tests, which were performed by permanent magnets and electromagnet setup. An extremely large tilting angle of over -270 degrees was obtained from an activation test by permanent magnet that has approximately 0.2T of magnetic strength. A large mechanical tilting angle of over -70 degrees was obtained by applying approximately 1.1mT to the mirror when 93mA was applied to solenoid setup. The large-tilting angle of the micromirror is due to the torsion bar, which was fabricated with Fe-based MG thin film that has large elastic strain limit, fracture toughness, and excellent magnetic property. (C) 2011 Optical Society of America
