[摘要]：We present a single-shot line sensor based on spectral interferometry. Light of a broadband laser source is chromatically dispersed by a grating and focused onto a line on the surface such that each focal point on this line is formed by another wavelength. The entire height profile is obtained by applying a phase evaluation algorithm to the registered interference signal, followed by a model-based approach. The sensor concept is finally verified by experimental results. (C) 2011 Optical Society of America
