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Microcantilever with integrated solid-state heater, conductive tip, and Schottky diode

  作者 Maniscalco, NI; King, WP  
  选自 期刊  Sensors And Actuators A-Physical;  卷期  2011年168-2;  页码  351-357  
  关联知识点  
 

[摘要]This paper reports a heated atomic force microscope cantilever having a Schottky diode fabricated near the cantilever free end. The forward bias and reverse bias operation of this cantilever offer different current-voltage characteristics, such that the c

 
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