A one-step photolithography method for fabrication of a staggered herringbone mixer using inclined UV lithography - art. no. 077001

[摘要]：We present a facile method for fabrication of a staggered herringbone mixer using inclined UV lithography, in which the incident UV angle is not perpendicular to the wafer. With this fabrication method, we were able to fabricate staggered herringbone ridg

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