A microdevice with large deflection for variable-ratio RF MEMS power divider applications - art. no. 074013

[摘要]：In this paper, we present the design and fabrication of a large deflection MEMS actuator directly integrated as a variable-ratio radio frequency (RF) power divider in a waveguide. The device is based on a tilting microplate suspended by SU-8 springs and d

[全文传递流程]：

一般上传文献全文的时限在1个工作日内