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MEMS-plunger platform for tunable terahertz wire laser at similar to 5 K - art. no. 075004

  作者 Qin, Q; Hu, Q  
  选自 期刊  Journal of Micromechanics and Microengineering;  卷期  2011年21-7;  页码  75004-75004  
  关联知识点  
 

[摘要]The tuning of a terahertz quantum cascade wire laser, operated at similar to 5 K, is demonstrated using a micro-machined metal or silicon object, called a 'plunger', attached to a MEMS-based two-stage flexure and actuated by a differential micrometer thro

 
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