Effects of segregation strength and an external field on the thermal line edge and line width roughness spectra of a diblock copolymer resist - art. no. 031803

[摘要]：The author uses computer simulations to measure the spectra of thermal line edge roughness (LER) and line width roughness (LWR) in a two-dimensional, symmetric, lamellar diblock copolymer melt over a range of segregation strengths. These measurements demo

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