个性化文献订阅>期刊> Journal Of Vacuum Science & Technology B
 

Phase change random access memory featuring silicide metal contact and high-kappa interlayer for operation power reduction - art. no. 032207

  作者 Fang, LWW; Zhao, R; Lim, KG; Yang, HX; Shi, LP; Chong, TC; Yeo, YC  
  选自 期刊  Journal Of Vacuum Science & Technology B;  卷期  2011年29-3;  页码  32207-32207  
  关联知识点  
 

[摘要]A phase change memory device integrated with a nickel monosilicide (NiSi) bottom electrode and a dielectric (Ta2O5) interlayer was investigated. The presence of a low thermal conductivity thin film between the bottom electrode and phase change layer promo

 
      被申请数(0)  
 

[全文传递流程]

一般上传文献全文的时限在1个工作日内