Parylene C-on-photoresist (POP): a low temperature spacer scheme for polymer/metal nanowire fabrication - art. no. 067001

[摘要]：This work introduced a novel spacer scheme for polymer/metal nanowire preparation by combining Parylene C and photoresist (Parylene C on photoresist, POP, process), both of which possess a low temperature fabrication essence. Adhesion between the Parylene

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