Inclined nanoimprinting lithography-based 3D nanofabrication - art. no. 065036

[摘要]：We report a 'top-down' 3D nanofabrication approach combining non-conventional inclined nanoimprint lithography (INIL) with reactive ion etching (RIE), contact molding and 3D metal nanotransfer printing (nTP). This integration of processes enables the prod

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