Bistable out-of-plane stress-mismatched thermally actuated bilayer devices with large deflection - art. no. 065030

[摘要]：In this paper, we explore microfabricated bistable actuators released as thin films from a silicon wafer. The actuators are based on a serpentine design where two cantilevers are coupled at the tips by a thin-film bar. These devices are parameterized by t

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