Reliability studies on Ta2O5 high-kappa dielectric metal-insulator-metal capacitors prepared by wet anodization - art. no. 01AB10

[摘要]：The temperature dependence of leakage current for tantalum oxide metal-insulator-metal capacitors has been investigated over the temperature range 20-160 degrees C. The leakage current shows an increase with temperature and the conduction mechanism at med

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