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Hot-carrier degradation caused interface state profile-Simulation versus experiment - art. no. 01AB09

  作者 Starkov, I; Tyaginov, S; Enichlmair, H; Cervenka, J; Jungemann, C; Carniello, S; Park, JM; Ceric, H; Grasser, T  
  选自 期刊  Journal Of Vacuum Science & Technology B;  卷期  2011年29-1;  页码  AB109-AB109  
  关联知识点  
 

[摘要]Hot-carrier degradation is associated with the buildup of defects at or near the silicon/silicon dioxide interfaced of a metal-oxide-semiconductor transistor. However, the exact location of the defects, as well as their temporal buildup during stress, is

 
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