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Processing dependences of channel hot-carrier degradation on strained-Si p-channel metal-oxide semiconductor field-effect transistors - art. no. 01AB07

  作者 Amat, E; Martin-Martinez, J; Gonzalez, MB; Rodriguez, R; Nafria, M; Aymerich, X; Verheyen, P; Simoen, E  
  选自 期刊  Journal Of Vacuum Science & Technology B;  卷期  2011年29-1;  页码  AB107-AB107  
  关联知识点  
 

[摘要]The channel hot-carrier (CHC) degradation in metal-oxide semiconductor field-effect transistors based on a high-k dielectric with strained-Si/relaxed Si1-xGex structures has been little studied so far. However, due to the high mobility enhancement observe

 
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