Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition - art. no. 01A304

[摘要]：Strontium titanate (STO) is a dielectric with a cubic perovskite type structure and of increasing interest for microelectronics, especially in the metal-insulator-metal (MIM) capacitors due to its high dielectric constant. The dielectric constant of the S

[全文传递流程]：

一般上传文献全文的时限在1个工作日内