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Vision-based approach to automated analysis of structure boundaries in scanning electron microscope images - art. no. 011033

  作者 Kim, NH; Lee, SY  
  选自 期刊  Journal Of Vacuum Science & Technology B;  卷期  2011年29-1;  页码  11033-11033  
  关联知识点  
 

[摘要]In this article, a vision-based approach is presented for the automatic measurement of feature dimensions from cross-section scanning electron microscope images of three-dimensional structures. The cross-sections of fabricated structures are represented b

 
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