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Preliminary Study of Resonant Mass Sensors Based on Asymmetrically Gapped Cantilevers

  作者 Tu, HE; Zheng, QL; Xu, Y  
  选自 期刊  IEEE Sensors Journal;  卷期  2011年11-5;  页码  1107-1111  
  关联知识点  
 

[摘要]This paper reports the proof of concept of resonant mass sensors based on asymmetrically gapped cantilevers using a mesoscale prototype. The asymmetrically gapped cantilever structure helps to increase the displacement sensitivity significantly and conseq

 
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