Heterogenous integration of a thin-film GaAs photodetector and a microfluidic device on a silicon substrate - art. no. 035008

[摘要]：In this paper, heterogeneous integration of a III-V semiconductor thin-film photodetector (PD) with a microfluidic device is demonstrated on a SiO2-Si substrate. Thin-film format of optical devices provides an intimate integration of optical functions wit

[全文传递流程]：

一般上传文献全文的时限在1个工作日内