Batch Fabrication of High-Performance Planar Patch-Clamp Devices in Quartz

[摘要]：The success of the patch-clamp technique has driven an effort to create wafer-based patch-clamp platforms. We develop a lithographic/electrochemical processing scheme that generates ultrasmooth, high aspect ratio pores in quartz. These devices achieve gigaohm seals in nearly 80% of trials, with the majority exhibiting seal resistances from 20-80 G Omega, competing with pipette-based patch-clamp measurements.

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