CMOS-integrated high-speed MSM germanium waveguide photodetector

[摘要]：A compact waveguide-integrated Germanium-on-insulator (GOI) photodetector with 10 +/- 2fF capacitance and operating at 40Gbps is demonstrated. Monolithic integration of thin single-crystalline Ge into front-end CMOS stack was achieved by rapid melt growth during source-drain implant activation anneal. (C) 2010 Optical Society of America

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