Low-Cost Fabrication of Transparent Hard Replica Molds for Imprinting Lithography

[摘要]：A new and cost-effective replica fabrication method for transparent and hard molds used in imprinting lithography is presented. The process uses a polymer copy as a carrier. Replicated hard molds eliminate the need for direct contact between the master and the patterned polymer on the substrate, and thus reduce contamination of the master.

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