Microtexture and Grain Boundaries in Freestanding CVD Diamond Films: Growth and Twinning Mechanisms

[摘要]：Three groups of free-standing chemical vapor deposition (CVD) diamond films formed with variations in substrate temperature, methane concentration, and film thickness are analyzed using high-resolution electron back-scattering diffraction. Primarily {001}, {110}, and {111} fiber textures are observed. In addition, corresponding primary and higher order twinning components are found. As interlaces, high angle, low angle, primary twin, and secondary twin boundaries are observed. A growth and a twinning model are proposed based on the sp(3) hybridization of the bond in the CH4 molecule that is used as the deposition medium.

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