【文章名】Comparative and quantitative study of neutral debris emanated from tin plasmas produced by neodymium-doped yttrium-aluminum-garnet and carbon dioxide laser pulses
Comparative and quantitative study of neutral debris emanated from tin plasmas produced by neodymium-doped yttrium-aluminum-garnet and carbon dioxide laser pulses
作者
Matsuoka, Y; Nakai, Y; Fujioka, S; Maeda, S; Shimomura, M; Shimada, Y; Sunahara, A; Nishimura, H; Yoshida, M
[摘要]：Amount of neutral debris emanated from extreme ultraviolet light source must be minimized to maximize its lifetime. Emanation of neutral atomic debris was experimentally investigated using laser-induced-fluorescence technique for carbon dioxide (CO2, 10.6 mu m in wavelength) and Nd-doped yttrium-aluminum-garnet (Nd:YAG, 1.064 mu m) lasers irradiated tin foils. Total number of neutral atomic debris from CO2 laser-irradiated tin foils was 1/100 times smaller than that from Nd:YAG irradiated ones. Competitiveness of CO2 laser was revealed in terms of debris mitigation. (C) 2010 American Institute of Physics. [doi:10.1063/1.3486170]
