[摘要]:The breakdown temperature T-b of electrons in SF6 gas is obtained by expressing the ionization and attachment coefficients of the gas in terms of the electron temperature T-e assuming that the electron energy in the gas is in a Maxwellian distribution. The sparking criterion of the SF6 gas was obtained in terms of the gas pressure p and the anode-cathode distance d. It was found that the breakdown temperature T-b of electrons in SF6 in a high-pressure gas characterized by pd >> 0.001 is 4.9 eV, which is independent of the parameter pd. Here, pd is in units of atm cm. (C) 2010 American Institute of Physics. [doi:10.1063/1.3502476]