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Thick film flow sensor for biological microsystems

  作者 de Torres, HB; Rensch, C; Fischer, M; Schober, A; Hoffmann, M; Muller, J  
  选自 期刊  Sensors And Actuators A-Physical;  卷期  2010年160-1-2;  页码  109-115  
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[摘要]An anemometer for the in situ control of the flow rates in fluidic systems is designed, manufactured and characterized. For the first time, a flow sensor according to the boundary layer principle is manufactured with exclusive use of thick film technologi

 
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