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Cantilever beam designs for RF MEMS switches

  作者 Rahman, HU; Chan, KY; Ramer, R  
  选自 期刊  Journal of Micromechanics and Microengineering;  卷期  2010年20-7;  页码  75042-75042  
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[摘要]This paper presents the design, modeling, fabrication and measurements of two novel radio frequency microelectromechanical systems (RF MEMS) switches. Two new non-standard cantilever beams have been designed in order to validate the mathematical model dev

 
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