MEMS variable capacitance devices utilizing the substrate: I. Novel devices with a customizable tuning range

[摘要]：This paper, the first in a series of two, presents a paradigm shift in the design of MEMS parallel plate PolyMUMPS variable capacitance devices by proposing two structures that utilize the substrate and are able to provide predetermined, customizable, tun

[全文传递流程]：

一般上传文献全文的时限在1个工作日内