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Analytical Model of a PZT Thick-Film Triaxial Accelerometer for Optimum Design

  作者 Hindrichsen, CC; Almind, NS; Brodersen, SH; Hansen, O; Thomsen, EV  
  选自 期刊  IEEE Sensors Journal;  卷期  2009年9-4;  页码  419-429  
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[摘要]We present a mechanical model of a triaxial micro accelerometer design using PZT thick-film as the sensing material. The model is based on the full anisotropic material tensors and Eulers' beam equation using simplifying assumptions where the smaller stre

 
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