Pirani Vacuum Gauges Using Silicon-on-Glass and Dissolved-Wafer Processes for the Characterization of MEMS Vacuum Packaging

[摘要]：This paper presents the design and implementation of Pirani vacuum gauges for the characterization of vacuum packaging of microelectromechanical systems (MEMS). Various Pirani vacuum gauges are fabricated with two different standard in-house fabrication p

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