[摘要]：In this contribution the design, fabrication, and characterization of a miniaturized process rheometer in plastic electronics technology is presented. This device type features electromagnetic excitation and an inductive readout mechanism. The resonance behavior of several vibration modes of the clamped-clamped structure is determined. The modeling of the fluid-structure interaction allows the derivation of rheological parameters of the fluid under investigation from the measured frequency response. Vibration amplitudes of several micrometers and low operation frequencies make these devices suitable for the analysis of complex liquids like suspensions and emulsions. Several prototypes were manufactured and characterized in various test liquids. (C) 2007 Elsevier B.V. All rights reserved.
