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Undercut structure fabricated by complementary-structure micropatterning technique for the passive-matrix display of organic light-emitting diodes

  作者 Xing, R; Xuan, Y; Ma, DG; Han, YC  
  选自 期刊  Journal Of Vacuum Science & Technology B;  卷期  2008年26-1;  页码  1-5  
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[摘要]This paper reports a new patterning method, the complementary-structure micropatterning (CSMP) technique, to fabricate the undercut structures for the passive-matrix display of organic light-emitting diodes (OLEDs). First, the polyvinylpyrrolidone (PVP) stripe patterns with a trapeziform cross-section were formed by micromolding in capillaries. Then the photoresist was spin coated on the substrate with the patterned PVP stripes and developed in water. The PVP was dissolved and lifted off from the substrate with the photoresist deposited on it, resulting in the undercut structures of the remaining photoresist. The undercut structures with different configurations were obtained by adjusting the photoresist thickness. The undercut structures were further used as separators in the patterning of the passive-matrix display of OLEDs. No visible performance difference was observed compared with OLEDs patterned by the traditional method. (C) 2008 American Vacuum Society.

 
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