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[摘要]：This work presents CMOS micromachined dielectric cantilevers with integrated sharp tips for surface temperature measurement. The integrated cantilever can perform electrothermal actuation and piezoresistive sensing for maintaining a proper tip-sample contact. For a cantilever 280 mu m long, the measured thermoelectric power from the aluminum/polysilicon thermocouple is 22.6 +/- 0.36 mu V degrees C-1, the measured time constant is 796 mu s, and the drift due to thermal actuation is 0.15 +/- 0.057 mu V degrees C-1. The measured displacement by thermal actuation is 2.2 mu m at 17.8 mW and the measured thermal time constant is 79.6 mu s. The measured piezoresistive sensitivity and pre-amp noise are 0.48 mV mu m(-1) and 0.7 mu V Hz(-1/2), respectively, producing an equivalent input-referred noise displacement of 1.45 nm Hz(-1/2). |
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