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[摘要]：Design of a low-power micromachined ring-type fluxgate sensor with localized saturation cores has been made and optimized in this work. The design is accomplished by using the electromagnetic simulation software, Magnet (TM), which is capable of establishing a quantitative connection between the sensor parameters and the geometrical parameters of the model. Using recently developed data extraction techniques, the design with low power (19 mW) and high sensitivity (590 V/T at 60 mu T) can be achieved after a series of simulations. For comparison, an actual device has been fabricated with sensitivity of 650 V/T at 60 mu T, power consumption of 14 mW. The good agreement between the simulation and the experimental results validate our new approach for the design of low-power fluxgate. In addition, measurements using a second-harmonics-based detection circuit have been performed so that the noise, stability, and perming effect of the fabricated device are explored. |
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